TY  - CONF
AU  - Richard Silver
AU  - Bryan Barnes
AU  - Martin Sohn
AU  - Richard Quintanilha
AU  - Hui Zhou
AU  - Chris Deeb
AU  - Mark Johnson
AU  - Milton Goodwin
AU  - Dilip Patel
C2  - 7638: Metrology, Inspection, and Process Control for Microlithography XXIV,
Conference 7638, San Jose, CA
DA  - 2010-04-01
LA  - en
M1  - 7638
PB  - 7638: Metrology, Inspection, and Process Control for Microlithography XXIV,
Conference 7638, San Jose, CA
PY  - 2010
TI  - The Limits and Extensibility of Optical Patterned Defect Inspection
ER  -