TY  - JOUR
AU  - Richard Quintanilha
AU  - Bryan Barnes
AU  - Martin Sohn
AU  - Lowell Howard
AU  - Richard Silver
AU  - James Potzick
AU  - Michael Stocker
C2  - SPIE proceedings series
DA  - 2009-09-30
LA  - en
M1  - 7488
PB  - SPIE proceedings series
PY  - 2009
TI  - Photomask metrology using a 193 nm scatterfield microscope
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903929
ER  -