TY  - CONF
AU  - Bryan Barnes
AU  - Martin Sohn
AU  - Francois Goasmat
AU  - Hui Zhou
AU  - Richard Silver
AU  - Abraham Arceo
C2  - Proceedings of the SPIE, San Jose, CA
DA  - 2012-04-04
LA  - en
M1  - 8324
PB  - Proceedings of the SPIE, San Jose, CA
PY  - 2012
TI  - Scatterfield Microscopy of 22 nm Node Patterned Defects using Visible and DUV Light
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910963
ER  -