TY  - CONF
AU  - Ravikiran Attota
AU  - Michael Stocker
AU  - Richard Silver
AU  - Nathanael Heckert
AU  - Hui Zhou
AU  - Richard Kasica
AU  - Lei Chen
AU  - Ronald Dixson
AU  - Ndubuisi Orji
AU  - Bryan Barnes
AU  - Peter Lipscomb
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XXIII, John A. Allgair, Editor, San Jose, CA
DA  - 2008-09-01
LA  - en
M1  - 33
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XXIII, John A. Allgair, Editor, San Jose, CA
PY  - 2008
TI  - Through-focus Scanning and Scatterfield Optical Methods for Advanced Overlay Target Analysis
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902294
ER  -