TY - JOUR AU - Ravikiran Attota AU - Richard Silver AU - Ronald Dixson C2 - Applied Optics DA - 2008-01-01 LA - en M1 - 47 PB - Applied Optics PY - 2008 TI - Line Width Measurement Technique Using Through-Focus Optical Images UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823239 ER -