TY  - CONF
AU  - Ravikiran Attota
AU  - Abraham Arceo
AU  - Benjamin Bunday
AU  - Victor Vertanian
C2  - Metrology Inspection and Process Control, San Jose, CA
DA  - 2012-04-10
LA  - en
PB  - Metrology Inspection and Process Control, San Jose, CA
PY  - 2012
TI  - Patterned Defect & CD Metrology by TSOM Beyond the 22 nm Node
ER  -