TY  - CONF
AU  - Ravikiran Attota
AU  - Shrawan Singhal
AU  - Sreenivasan S.V.
C2  - Metrology Inspection and Process Control, San Jose, CA
DA  - 2012-04-10
LA  - en
PB  - Metrology Inspection and Process Control, San Jose, CA
PY  - 2012
TI  - Residual Layer Thickness Control and Metrology in Jet and Flash Imprint Lithography
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910872
ER  -