TY  - JOUR
AU  - Ravikiran Attota
AU  - Richard Silver
C2  - Measurement Science & Technology
DA  - 2011-12-21
LA  - en
PB  - Measurement Science & Technology
PY  - 2011
TI  - Nanometrology Using Through-Focus Scanning Optical Microscopy Method
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905395
ER  -