TY  - CONF
AU  - Ravikiran Attota
C2  - An International Conference on PRECISION, MESO, MICRO, AND NANO ENGINEERING, Pune, -1
DA  - 2011-12-10
LA  - en
PB  - An International Conference on PRECISION, MESO, MICRO, AND NANO ENGINEERING, Pune, -1
PY  - 2011
TI  - Three-dimensional Nanometrology with TSOM Optical Method
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=910045
ER  -