TY  - CONF
AU  - Ravikiran Attota
C2  - Frontiers of Characterization and Metrology for Nanoelectronics
, Grenoble, -1
DA  - 2011-11-18
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics
, Grenoble, -1
PY  - 2011
TI  - TSOM Method for Nanoelectronics Dimensional Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908623
ER  -