TY  - CONF
AU  - Ravikiran Attota
AU  - Ronald Dixson
AU  - John Kramar
AU  - James Potzick
AU  - Andras Vladar
AU  - Benjamin Bunday
AU  - Erik Novak
AU  - Andrew Rudack
C2  - SPIE Advanced Lithography, San Jose, CA
DA  - 2011-04-18
LA  - en
M1  - 7971
PB  - SPIE Advanced Lithography, San Jose, CA
PY  - 2011
TI  - TSOM Method for Semiconductor Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908177
ER  -