TY  - JOUR
AU  - Ravikiran Attota
AU  - Richard Silver
C2  - Optics Letters
DA  - 2008-09-01
LA  - en
M1  - 33
PB  - Optics Letters
PY  - 2008
TI  - Through-focus scanning optical microscope imaging method for nano-scale dimensional analysis
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824668
ER  -