TY  - JOUR
AU  - James Maslar
AU  - William Kimes
AU  - Brent Sperling
C2  - Journal of Nanoscience and Nanotechnology
DA  - 2011-07-12
LA  - en
M1  - 11
PB  - Journal of Nanoscience and Nanotechnology
PY  - 2011
TI  - In Situ Gas Phase Measurements During Metal Alkylamide Atomic Layer Deposition
ER  -