TY  - JOUR
AU  - Richard Silver
AU  - Bryan Barnes
AU  - Ravikiran Attota
AU  - Jay Jun
AU  - Michael Stocker
AU  - Egon Marx
AU  - Heather Patrick
C2  - Applied Optics
DA  - 2007-06-20
LA  - en
M1  - 46
PB  - Applied Optics
PY  - 2007
TI  - Extending the Limits of Image-Based Optical Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823218
ER  -