TY  - JOUR
AU  - Adam Steele
AU  - Brenton Knuffman
AU  - Jabez McClelland
AU  - Jon Orloff
C2  - Journal of Vacuum Science and Technology B
DA  - 2010-10-21
LA  - en
M1  - 28
PB  - Journal of Vacuum Science and Technology B
PY  - 2010
TI  - A Focused Chromium Ion Beam
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906025
ER  -