TY  - CONF
AU  - Chukwudi Okoro
AU  - Lyle Levine
AU  - Yaw Obeng
AU  - Ruqing Xu
C2  - Proceeding of IEEE Electronic Components and Technology Conference (ECTC), San Diego, CA
DA  - 2015-05-27
LA  - en
PB  - Proceeding of IEEE Electronic Components and Technology Conference (ECTC), San Diego, CA
PY  - 2015
TI  - Experimentally, How Does Cu TSV Diameter Influence its Stress State?
ER  -