TY  - JOUR
AU  - Andras Vladar
AU  - John Villarrubia
AU  - Michael Postek
AU  - Petr Cizmar
C2  - Proceedings of SPIE
DA  - 2012-04-19
LA  - en
M1  - 8324
PB  - Proceedings of SPIE
PY  - 2012
TI  - Can We Get 3D CD Metrology Right?
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911117
ER  -