TY  - CONF
AU  - Michael Postek
AU  - Andras Vladar
AU  - Bin Ming
C2  - 2009 SCANNING/SPIE Proceedings, Monterrey, CA
DA  - 2009-09-01
LA  - en
PB  - 2009 SCANNING/SPIE Proceedings, Monterrey, CA
PY  - 2009
TI  - Recent Progress in Understanding the Imaging and Metrology using the Helium Ion Microscope
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902762
ER  -