TY  - CONF
AU  - Michael Postek
AU  - Andras Vladar
AU  - Bin Ming
C2  - FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS , Albany, NY
DA  - 2009-03-01
LA  - en
PB  - FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS , Albany, NY
PY  - 2009
TI  - Understanding Imaging and Metrology with the Helium Ion Microscope
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902394
ER  -