TY  - CONF
AU  - Theodore Vorburger
AU  - Ronald Dixson
AU  - Ndubuisi Orji
AU  - Joseph Fu
AU  - Richard Allen
AU  - Michael Cresswell
AU  - Vincent Hackley
C2  - 2nd International Conference on Surface Metrology, Worcester, MA
DA  - 2010-10-01
LA  - en
PB  - 2nd International Conference on Surface Metrology, Worcester, MA
PY  - 2010
TI  - Nano- and Atom-scale Length Metrology
ER  -