TY - JOUR AU - Vivek Prabhu AU - Shuhui Kang AU - Wen-Li Wu AU - Sushil Satija AU - Christopher Ober AU - Jing Sha AU - Peter Bonnesen C2 - Advanced Functional Materials DA - 2012-05-11 LA - en PB - Advanced Functional Materials PY - 2012 TI - Neutron reflectivity characterization of the photoacid reaction-diffusion latent and developed images of molecular resists for extreme-ultraviolet lithography UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908575 ER -