TY  - JOUR
AU  - Vivek Prabhu
AU  - Shuhui Kang
AU  - Christopher Soles
AU  - Christopher Ober
AU  - Jing Sha
AU  - Jin-Kyun Lee
AU  - Peter Bonnesen
C2  - Chemistry of Materials
DA  - 2010-04-20
LA  - en
PB  - Chemistry of Materials
PY  - 2010
TI  - Architectural Effects on Reaction-Diffusion Kinetics in Molecular Glass Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=904649
ER  -