TY  - JOUR
AU  - Vivek Prabhu
AU  - Shuhui Kang
AU  - David VanderHart
AU  - Eric Lin
AU  - Wen-Li Wu
C2  - Advanced Materials
DA  - 2010-09-16
LA  - en
PB  - Advanced Materials
PY  - 2010
TI  - Photoresist latent and developer images as probed by neutron reflectivity methods
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902742
ER  -