TY - SER AU - Nien Zhang AU - Richard Silver AU - Hui Zhou AU - Bryan Barnes C2 - World Scientific, Singapore, -1 DA - 2015-06-25 DO - https://doi.org/10.1142/9789814678629_0049 LA - en M1 - 10 PB - World Scientific, Singapore, -1 PY - 2015 TI - Use of Bayesian Statistics to Improve Optical Measurement Uncertainty by Combined Multi-Tool Metrology ER -