TY  - JOUR
AU  - Janet Cassard
C2  - Journal of Microelectromechanical Systems
DA  - 2001-03-01
LA  - en
M1  - 10
PB  - Journal of Microelectromechanical Systems
PY  - 2001
TI  - New Optomechanical Technique for Measuring Layer Thickness in MEMS Processes, Journal of Microelectromechanical Systems
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=16356
ER  -