TY  - GEN
AU  - Janet Cassard
AU  - Jon Geist
AU  - Theodore Vorburger
AU  - David Read
AU  - Michael Gaitan
AU  - David Seiler
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2013-02-15
DO  - https://doi.org/10.6028/NIST.SP.260-177
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2013
TI  - User's Guide for RM 8096 and 8097: The MEMS 5-in-1, 2013 Edition
ER  -