TY  - GEN
AU  - Janet Cassard
AU  - Jon Geist
AU  - Theodore Vorburger
AU  - David Read
AU  - David Seiler
C2  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2011-09-06
LA  - en
PB  - Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2011
TI  - User's Guide for SRM 2494 and 2495: The MEMS 5-in-1, 2011 Edition
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909186
ER  -