TY  - JOUR
AU  - Frank DelRio
AU  - Brad Boyce
AU  - Jake Benzing
AU  - Lawrence Friedman
AU  - Robert Cook
C2  - Journal of Micromechanics and Microengineering
DA  - 2020-11-06
DO  - https://doi.org/10.1088/1361-6439/abbf89
LA  - en
PB  - Journal of Micromechanics and Microengineering
PY  - 2020
TI  - Shoulder fillet effects in strength distributions of MEMS components
ER  -