TY  - CONF
AU  - Chukwudi Okoro
AU  - Lyle Levine
AU  - Oleg Kirillov
AU  - Yaw Obeng
AU  - Ruqing Xu
AU  - Jonathan Z.
AU  - Wenjun Liu
AU  - Klaus
C2  - Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV
DA  - 2013-05-28
LA  - en
PB  - Proceeding of IEEE Electronic Components and Technology Conference (ECTC), Las Vegas, NV
PY  - 2013
TI  - X-Ray Micro-Beam Diffraction Determination of Full Stress Tensors in Cu TSVs
ER  -