TY  - JOUR
AU  - Gheorghe Stan
AU  - Ebony Mays
AU  - Hui-Jae Yoo
AU  - Sean King
C2  - ACS Nano
DA  - 2016-10-02
LA  - en
PB  - ACS Nano
PY  - 2016
TI  - Nanoscale tomographic reconstruction of the subsurface mechanical properties of low-k high-aspect ratio patterns
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920549
ER  -