TY  - JOUR
AU  - Joel Weber
AU  - Matthew Brubaker
AU  - Thomas Wallis
AU  - Kristine Bertness
C2  - Microelectronic Engineering
DA  - 2017-07-27
LA  - en
M1  - 181
PB  - Microelectronic Engineering
PY  - 2017
TI  - Lithographic sonication patterning of large area nanopillar forests
ER  -