TY - JOUR AU - Alexana Roshko AU - Jaclyn Springer AU - Steven AU - Andrew Cavanagh AU - Huaxing Sun AU - Paul Blanchard C2 - Journal of Physical Chemistry C DA - 2018-03-29 DO - https://doi.org/10.1021/acs.jpcc.8b00796 LA - en M1 - 122 PB - Journal of Physical Chemistry C PY - 2018 TI - Electron-Enhanced Atomic Layer Deposition (EE-ALD) of Boron Nitride Thin Films at Room Temperature and 100°C ER -