TY  - CONF
AU  - Bryan Barnes
AU  - Mark
C2  - Proceedings of the SPIE, San Jose, CA
DA  - 2020-03-24
DO  - https://doi.org/10.1117/12.2551504
LA  - en
M1  - 11325
PB  - Proceedings of the SPIE, San Jose, CA
PY  - 2020
TI  - Contrasting Conventional and Machine Learning Approaches to Optical Critical Dimension Measurements
ER  -