TY  - VIDEO
AU  - Thomas Moffat
AU  - Chang Lee
AU  - Daniel Josell
C2  - E-Chem Magazine
DA  - 2010-01-01
LA  - en
PB  - E-Chem Magazine
PY  - 2010
TI  - 3-D Metallization by Damascene Electrodeposition
ER  -