TY - JOUR AU - Jason Gorman AU - Kenn Oldham AU - Robert M'Closkey C2 - Mechatronics DA - 2020-02-02 DO - https://doi.org/10.1016/j.mechatronics.2019.102316 LA - en M1 - 65 PB - Mechatronics PY - 2020 TI - Introduction to the special issue on MEMS dynamics and control ER -