TY  - GEN
AU  - James Liddle
AU  - Jerry Bowser
AU  - Bojan Ilic
AU  - Vincent Luciani
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2020-02-21
DO  - https://doi.org/10.6028/jres.125.009
LA  - en
M1  - 125
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2020
TI  - So, You Want to Have a Nanofab? SharedUse Nanofabrication and Characterization Facilities: Cost-of-Ownership, Toolset, Utilization, and Lessons Learned
ER  -