TY  - JOUR
AU  - Berc Kalanyan
AU  - Ryan Beams
AU  - Michael Katz
AU  - Albert Davydov
AU  - James Maslar
AU  - Ravindra Kanjolia
C2  - Journal of Vacuum Science & Technology A
DA  - 2018-12-31
LA  - en
PB  - Journal of Vacuum Science & Technology A
PY  - 2018
TI  - Atomic layer deposition of MoS2 films using bis(tert-butylimido)-bis(dimethylamido)molybdenum and 1-propanethiol
ER  -