TY  - JOUR
AU  - Daniel Sunday
AU  - Regis Kline
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2018-11-03
LA  - en
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2018
TI  - Methodology for evaluating the information distribution in small angle scattering from periodic nanostructures
ER  -