TY  - CONF
AU  - Darine El
AU  - Frank Seifert
AU  - Stephan Schlamminger
AU  - Leon Chao
AU  - David Newell
AU  - Jon Pratt
C2  - CPEM 2014 Digest, Rio de Janeiro, -1
DA  - 2014-08-24
LA  - en
PB  - CPEM 2014 Digest, Rio de Janeiro, -1
PY  - 2014
TI  - Heterodyne interferometer with subnanometer accuracy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=915347
ER  -