TY  - JOUR
AU  - Robert Cook
AU  - Frank DelRio
AU  - Brad Boyce
C2  - Microsystems & Nanoengineering
DA  - 2019-11-04
DO  - https://doi.org/10.1038/s41378-019-0093-y
LA  - en
M1  - 5
PB  - Microsystems & Nanoengineering
PY  - 2019
TI  - Predicting strength distributions of MEMS structures using flaw size and spatial density
ER  -