TY  - JOUR
AU  - Brent Sperling
AU  - James Maslar
C2  - Journal of Vacuum Science and Technology B
DA  - 2019-10-22
DO  - https://doi.org/10.1116/1.5125446
LA  - en
M1  - 37
PB  - Journal of Vacuum Science and Technology B
PY  - 2019
TI  - Experiment-based modelling of a vapor draw ampoule used for low-volatility precursors
ER  -