TY  - JOUR
AU  - Bryan Barnes
AU  - Mark-Alexander Henn
AU  - Martin Sohn
AU  - Hui Zhou
AU  - Richard Silver
C2  - ECS Transactions
DA  - 2019-10-04
DO  - https://doi.org/10.1149/09201.0073ecst
LA  - en
M1  - 92
PB  - ECS Transactions
PY  - 2019
TI  - Appraising the extensibility of optics-based metrology for emerging materials
ER  -