TY  - JOUR
AU  - Mark-Alexander Henn
AU  - Hui Zhou
AU  - Bryan Barnes
C2  - OSA Continuum
DA  - 2019-09-05
DO  - https://doi.org/10.1364/OSAC.2.002683
LA  - en
M1  - 2
PB  - OSA Continuum
PY  - 2019
TI  - Data-driven approaches to optical patterned defect detection
ER  -