TY - JOUR AU - Bryan Barnes AU - Mark AU - Martin Sohn AU - Hui Zhou AU - Richard Silver C2 - Physical Review Applied DA - 2019-06-24 DO - https://doi.org/10.1103/PhysRevApplied.11.064056 LA - en M1 - 11 PB - Physical Review Applied PY - 2019 TI - Assessing form-dependent optical scattering at vacuum- and extreme-ultraviolet wavelengths off nanostructures with two-dimensional periodicity ER -