TY  - JOUR
AU  - Roberto De
AU  - Christopher Wallin
AU  - Glenn Holland
AU  - Slava Krylov
AU  - Bojan Ilic
C2  - Journal of Applied Physics
DA  - 2019-07-01
DO  - https://doi.org/10.1063/1.5094743
LA  - en
M1  - 126
PB  - Journal of Applied Physics
PY  - 2019
TI  - Absolute deflection measurements in a micro- and nano-electromechanical Fabry-Perot interferometry system
ER  -