TY  - JOUR
AU  - David Olaya
AU  - Manuel Castellanos
AU  - Javier Pulecio
AU  - John Biesecker
AU  - Soroush Khadem
AU  - Theodore Lewitt
AU  - Peter Hopkins
AU  - Paul Dresselhaus
AU  - Samuel Benz
C2  - IEEE Transactions on Applied Superconductivity
DA  - 2019-02-18
DO  - https://doi.org/10.1109/TASC.2019.2900020
LA  - en
M1  - 29
PB  - IEEE Transactions on Applied Superconductivity
PY  - 2019
TI  - Planarized process for single-flux-quantum circuits with self-shunted Nb/NbxSi1-x/Nb Josephson junctions
ER  -