TY - CONF AU - Erik Secula AU - David Seiler C2 - Frontiers of Characterization and Metrology for Nanoelectronics: 2019, Monterey, CA DA - 2019-04-01 LA - en PB - Frontiers of Characterization and Metrology for Nanoelectronics: 2019, Monterey, CA PY - 2019 TI - Frontiers of Characterization and Metrology for Nanoelectronics: 2019 UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=927827 ER -