TY  - GEN
AU  - James Maslar
AU  - William Kimes
AU  - Brent Sperling
C2  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2019-03-26
DO  - https://doi.org/10.6028/jres.124.005
LA  - en
M1  - 124
PB  - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2019
TI  - Apparatus for Characterizing Gas-Phase Chemical Precursor Delivery for Thin Film Deposition Processes
ER  -