TY  - SER
AU  - John Dagata
AU  - H Kuramochi
C2  - Springer, NY, NY
DA  - 2011-06-15
DO  - https://doi.org/10.1007/978-1-4419-9899-6_2
LA  - en
PB  - Springer, NY, NY
PY  - 2011
TI  - Local oxidation using dynamic force mode: Toward higher reliability and efficiency
ER  -