TY  - CONF
AU  - Yaw Obeng
AU  - Chukwudi Okoro
AU  - Joseph Kopanski
C2  - TBD, Birmingham, -1
DA  - 2012-08-20
LA  - en
PB  - TBD, Birmingham, -1
PY  - 2012
TI  - Metrology for Nanosystems and Nanoelectronics Reliability Assessments
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911433
ER  -